Patent · US Active

Templated nanostructure sensors and methods of manufacture

US11192780B1 · kind B1 · utility

0Cited by

9References

20Claims

0Family size

Assignee

United States of America as represented by the Administrator of NASA · US

Inventors

Azlin M. Biaggi-Labiosa · Cleveland, US
Gary W. Hunter · Oberlin, US

Key dates

Filing date	Mar 25, 2019
Grant date	Dec 7, 2021
Priority date	—
Expiry date	Mar 25, 2039

Classification

Technology area (CPC G)Physics
CPC primaryG01N33/0047
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A microsensor and its method of manufacture are disclosed based on templated metal or metal oxide nanostructures. The microsensor includes an electrode that in one embodiment may be configured as a first sawtooth patterned electrode having a series of first peaks and first valleys and a second electrode that by be configured as a second sawtooth patterned electrode having a series of second peaks and second valleys where the second peaks generally align with the first peaks of the first electrode. A plurality of templated metal or metal oxide nanostructures connect on one side to the first electrode and on another side to the second electrode, where an electrical property of the microsensor changes in response to exposure to an environment to be monitored.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.