Patent · US Active

Process for manufacturing a microbolometer containing vanadium oxide-based sensitive material

US11193833B2 · kind B2 · utility

1Cited by

1References

20Claims

0Family size

Assignee

COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES · FR

Inventors

Denis Pelenc · Saint-Égrève, FR
Xavier Zucchi · Grenoble, FR
Claire Vialle · Saint-Égrève, FR
Valerie Goudon · Grenoble, FR
Abdelkader Aliane · Grenoble, FR

Key dates

Filing date	Feb 14, 2019
Grant date	Dec 7, 2021
Priority date	—
Expiry date	Feb 14, 2039

Classification

Technology area (CPC G)Physics
CPC primaryG01J5/046
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

The invention relates to a process for manufacturing a microbolometer (10) comprising a sensitive material (15) based on vanadium oxide (VOx) comprising an additional chemical element chosen from among boron (B), carbon (C), with the exception of nitrogen (N), comprising the following steps:

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.