Method and device for measuring transverse thermal conductivity of thin film
US11193902B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 15, 2017 |
| Grant date | Dec 7, 2021 |
| Priority date | — |
| Expiry date | Dec 18, 2037 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N25/02
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The disclosure provides a method for measuring the transverse thermal conductivity of a thin film. The method comprises the steps of measuring the longitudinal thermal conductivity of a thin film to be measured by using a 3ω method and by taking a second metal strip deposited on the surface of the thin film to be measured as a heating source at first; measuring the temperature rise of the thin film to be measured in the longitudinal direction by using the 3ω method, and deducing the thermal power of the thin film to be measured in the longitudinal direction; and finally, calculating the transverse thermal conductivity of the thin film to be measured. By adopting a ‘substrate/thin film to be measured/metal strip’ sample structure, the process difficulty of preparing a suspension structure sample can be effectively avoided.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.