Antireflection film having silver-containing layer and fluorocarbon layer, method for producing antireflection film, optical element, and optical system
US11194078B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Feb 28, 2019 |
| Grant date | Dec 7, 2021 |
| Priority date | — |
| Expiry date | Mar 15, 2040 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B15/145
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
Provided is an antireflection film that is formed by laminating an interlayer, a silver-containing metal layer containing silver, and a dielectric layer, in this order, on a substrate, in which the interlayer is a multilayer film having two or more layers, in which a layer of high refractive index having a relatively high refractive index and a layer of low refractive index having a relatively low refractive index are alternately laminated, and the dielectric layer has a surface to be exposed to air and is a multilayer film having two or more layers including an oxide layer and a fluorocarbon layer which is a self-assembled film that is formed by a silane coupling reaction to the oxide layer in this order.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.