Optical diffraction component for suppressing at least one target wavelength by destructive interference

US11194256B2 · kind B2 · utility

Assignee

• Carl Zeiss SMT GmbH · DE

Inventors

• Heiko Feldmann · Aalen, DE
• Valentin Jonatan Bolsinger · Aalen, DE
• William Peter Van Drent · Best, NL
• Jozef Petrus Henricus Benschop · Eindhoven, NL

Key dates

• Filing date: Nov 17, 2020
• Grant date: Dec 7, 2021
• Expiry date: Nov 17, 2040

Classification

• Technology area (CPC G): Physics
• CPC primary: G03F7/70575
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

An optical diffraction component is configured to suppress at least one target wavelength by destructive interference. The optical diffraction component includes at least three diffraction structure levels that are assignable to at least two diffraction structure groups. A first of the diffraction structure groups is configured to suppress a first target wavelength λ1. A second of the diffraction structure groups is configured to suppress a second target wavelength λ2, where (λ1−λ2)2/(λ1+λ2)2<20%. A topography of the diffraction structure levels can be described as a superimposition of two binary diffraction structure groups. Boundary regions between adjacent surface sections of each of the binary diffraction structure groups have a linear course and are superimposed on one another at most along sections of the linear course.