Adjusting mechanism for adjusting deformation of panel and electron beam detection apparatus comprising the same
US11195688B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Dec 30, 2019 |
| Grant date | Dec 7, 2021 |
| Priority date | — |
| Expiry date | Jan 18, 2040 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/28
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
An adjusting mechanism for adjusting a deformation of a panel and an electron beam detection apparatus comprising the same are disclosed, the adjusting mechanism including: a support plate, which is provided opposite to the panel, with a periphery of the support plate being in positive fit with a periphery of the panel; and at least one screw set, each screw set comprising: at least one first screw, each first screw penetrating through the support plate, and in turn being connected to the panel by being screwed into the panel; and at least one second screw, each second screw being screwed to penetrate through the support plate and to abut against the panel; the support has its structural rigidity larger than a structural rigidity of the panel.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.