Patent · US Active

Pressure sensor stacking arrangement, measuring device and method for the production thereof

US11199461B2 · kind B2 · utility

0Cited by

5References

13Claims

0Family size

Assignee

Robert Bosch GmbH · DE

Inventors

Conrad Haeussermann · Trochtelfingen, DE
Florian Guffarth · Reutlingen, DE
Lars Sodan · Reutlingen, DE
Vicente Amor Burgos · Gomaringen, DE
Vijaye Kumar Rajaraman · Villach, AT

Key dates

Filing date	Jul 20, 2018
Grant date	Dec 14, 2021
Priority date	—
Expiry date	Aug 6, 2038

Classification

Technology area (CPC G)Physics
CPC primaryG01L19/148
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A pressure sensor system having at least one pressure sensor device. The pressure sensor device has a stack having a ceramic substrate, at least one signal processing element, and at least one sensor element. The pressure sensor device is placed in a sensor housing provided with a membrane, and a residual volume of the sensor housing provided with the membrane is filled with an incompressible fluid. A method for producing such a pressure sensor system, and to a measuring device, are also described.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.