Method and device for adjusting quality determination conditions for test body
US11199503B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Nov 3, 2017 |
| Grant date | Dec 14, 2021 |
| Priority date | — |
| Expiry date | Aug 25, 2038 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2035/0091
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method for adjusting a condition for determining a quality of an inspection object comprises: acquiring measurement values for the structures of a plurality of inspection objects; determining whether each of the plurality of inspection objects is good or defective by comparing error values of the measurement values with respect to design values with a predetermined reference value; identifying one or more inspection objects in which determination error has occurred among the plurality of inspection objects; generating and outputting an inspection result graph including the number of inspection objects according to the error values, the reference value, and the number of the one or more inspection objects in which the determination error has occurred; updating the reference value according to a graphical input; and redetermining whether each of the plurality of inspection objects is good or defective by comparing the error values with the updated reference value.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.