Shape inspection apparatus and shape inspection method
US11199504B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 7, 2018 |
| Grant date | Dec 14, 2021 |
| Priority date | — |
| Expiry date | Dec 7, 2038 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2021/8924
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A shape inspection apparatus includes N illumination light sources, a line sensor camera, a measurement control unit, and a data processing unit. The measurement control unit controls the illumination light sources to modulate luminescence intensities at a frequency that is 1/N of a frequency of a scan rate of the line sensor camera, and to emit lights by sequentially repeating N different patterns of illumination intensity ratios. The data processing unit generates a first separated image and a second separated image based on a photographed image, generates a first mixing elimination image acquired by removing an unnecessary illumination component from the first separated image, and a second mixing elimination image acquired by removing an unnecessary illumination component from the second separated image, and calculates an inclination of the surface of the strip-shaped body based on a difference between the first mixing elimination image and the second mixing elimination image.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.