Polymer brush adhesion promoter with UV cleavable linker
US11199778B2 · kind B2 · utility
0Cited by
6References
14Claims
0Family size
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Key dates
| Filing date | Mar 12, 2019 |
| Grant date | Dec 14, 2021 |
| Priority date | — |
| Expiry date | Nov 8, 2039 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/325
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A method of making an adhesion layer of an extreme ultraviolet (EUV) stack is presented. The method includes grafting an ultraviolet (UV) sensitive polymer brush on a hardmask, the polymer brush including a UV cleavable unit, depositing EUV resist over the polymer brush, exposing the EUV resist to remove the EUV resist in exposed areas by applying a developer, and flooding the exposed area with a UV light and a solvent developer to remove exposed portions of the polymer brush.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.