Semiconductor storage device
US11201171B2 · kind B2 · utility
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18Claims
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Assignee
Inventors
Key dates
| Filing date | Aug 31, 2020 |
| Grant date | Dec 14, 2021 |
| Priority date | — |
| Expiry date | Aug 31, 2040 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10B53/10
- WIPO fieldComputer technology
- WIPO sectorElectrical engineering
Abstract
A semiconductor storage device includes a stacked body and a columnar body. The stacked body includes a plurality of conductive layers spaced apart from each other in a stacking direction. The columnar body penetrates the stacked body in the stacking direction. The columnar body includes a columnar ferroelectric film, a semiconductor film disposed between the ferroelectric film and the conductive layers, and an insulating film disposed between the semiconductor film and the conductive layers.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.