Vacuum valve system for a regulated operation of a vacuum process
US11204107B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Nov 2, 2017 |
| Grant date | Dec 21, 2021 |
| Priority date | — |
| Expiry date | May 8, 2038 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF16K31/535
- WIPO fieldMechanical elements
- WIPO sectorMechanical engineering
Abstract
A valve system having a vacuum valve and a regulating unit is disclosed. The vacuum valve has a valve seat including a valve opening, a first seal surface, and a valve closure for closing the valve opening using a second seal surface. A drive unit coupled to the valve closure is designed to be adjusted to provide respective valve opening states. The regulating unit adjusts the valve opening state by actuating the drive unit based on a currently determined regulating variable and a target variable. The regulating unit has a checking function configured such that a series of states of the valve closure are detected as park of the regulating process, and the states are stored as current regulating data. The current regulating data is compared with specified target regulating data and process information is generated based on the comparison of the current and the target regulating data.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.