Laser bar and semiconductor laser and method of producing laser bars and semiconductor lasers

US11205885B2 · kind B2 · utility

Assignee

• Osram OLED GMBH · DE

Inventors

• Roland Enzmann · Regensburg, DE
• Hubert Halbritter · Dietfurt, DE
• Markus Bröll · Cork, IE

Key dates

• Filing date: Apr 16, 2018
• Grant date: Dec 21, 2021
• Expiry date: May 22, 2038

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01S2301/176
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

A method of producing laser bars or semiconductor lasers includes providing a carrier composite to form a plurality of carriers for the laser bars or for the semiconductor lasers, providing a semiconductor body composite including a common substrate and a common semiconductor layer sequence grown thereon, forming a plurality of separation trenches through the common semiconductor layer sequence such that the semiconductor body composite is divided into a plurality of semiconductor bodies, applying the semiconductor body composite to the carrier composite such that the separation trenches face the carrier composite, thinning or removing the common substrate, and singulating the carrier composite into a plurality of carriers, wherein a plurality of semiconductor bodies are arranged on one of the carriers, and the semiconductor bodies arranged on one common carrier are laterally spaced apart from one another by the separation trenches.