Quartz orientation for guided SAW devices
US11206007B2 · kind B2 · utility
3Cited by
16References
18Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 17, 2018 |
| Grant date | Dec 21, 2021 |
| Priority date | — |
| Expiry date | Feb 2, 2040 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03H9/02866
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
Guided Surface Acoustic Wave (SAW) devices with improved quartz orientations are disclosed. A guided SAW device includes a quartz carrier substrate, a piezoelectric layer on a surface of the quartz carrier substrate, and at least one interdigitated transducer on a surface of the piezoelectric layer opposite the quartz carrier substrate. The quartz carrier substrate includes an orientation that provides improved performance parameters for the SAW device, including electromechanical coupling factor, resonator quality factor, temperature coefficient of frequency, and delta temperature coefficient of frequency.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.