Mask and method of manufacturing mask assembly including the same
US11207705B2 · kind B2 · utility
7Cited by
8References
13Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 12, 2020 |
| Grant date | Dec 28, 2021 |
| Priority date | — |
| Expiry date | Mar 12, 2040 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10K71/233
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A mask and a method of manufacturing a mask assembly, the mask including a body, and the body including one end and another end facing each other in a length direction and having a first surface and a second surface facing each other in a thickness direction; and a pattern region between the one end and the other end, the pattern region including a plurality of pattern holes and a plurality of ribs between the plurality of pattern holes, wherein a curl value of the mask, which is defined as a shortest distance from a plane tangent to a center of the body to the one end or the other end of the body, is 1,000 μm to 4,000 μm.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.