Patent · US Active

Heater structure configured to improve thermal efficiency in a modulator device

US11209673B2 · kind B2 · utility

1Cited by
9References
20Claims
0Family size

Assignee

Inventors

Key dates

Filing dateJan 3, 2020
Grant dateDec 28, 2021
Priority date
Expiry dateJan 3, 2040

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG02F2203/50
  • WIPO fieldOptics
  • WIPO sectorInstruments

Abstract

Various embodiments of the present disclosure are directed towards a modulator device including a first waveguide and a heater structure. An input terminal is configured to receive impingent light. The first waveguide has a first output region and a first input region coupled to the input terminal. A second waveguide is optically coupled to the first waveguide. The second waveguide has a second output region and a second input region coupled to the input terminal. An output terminal is configured to provide outgoing light that is modulated based on the impingent light. The output terminal is coupled to the first output region and the second output region. The heater structure overlies the first waveguide. A bottom surface of the heater structure is aligned with a bottom surface of the first waveguide. The first waveguide is spaced laterally between sidewalls of the heater structure.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.