Patent · US Active

Deposition mask device and method of manufacturing deposition mask device

US11211558B2 · kind B2 · utility

3Cited by
1References
5Claims
0Family size

Assignee

Inventors

Key dates

Filing dateJun 12, 2019
Grant dateDec 28, 2021
Priority date
Expiry dateJun 12, 2039

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH10K71/621
  • WIPO fieldSurface technology, coating
  • WIPO sectorChemistry

Abstract

A vapor deposition mask device includes a vapor deposition mask having an effective region in which a plurality of first through holes is disposed, and a frame attached to the vapor deposition mask. The vapor deposition mask device includes a plurality of joint portions that joins the vapor deposition mask and the frame to each other. The plurality of joint portions is arranged along the outer edge of the vapor deposition mask. A notch is formed at a position corresponding to between two adjacent joint portions in the outer edge of the vapor deposition mask.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.