Resonator configured to be integrated into an inertial angular sensor
US11215456B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | Apr 13, 2018 |
| Grant date | Jan 4, 2022 |
| Priority date | — |
| Expiry date | Jun 21, 2038 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01C19/5712
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The invention concerns a resonator 1 configured to be integrated into an inertial angular sensor, said resonator 1 comprising at least one mass suspended by mechanical springs 5, a number N of pairs Pi (2≤i≤N) of electrostatic springs 50, said resonator 1 defining at least four axes of symmetry S1, S2, S3 and S4, characterized in that: each pair Pi consists of two electrostatic springs 50 each having a privileged axis of action, these electrostatic springs 50 being positioned so that their respective axes form a right angle; for at least one spring of one of the pairs and one spring of another pair, the angle formed by these two springs is equal to a predefined angle.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.