Gas detecting apparatus and method based on terahertz spectroscopy
US11215554B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | May 21, 2020 |
| Grant date | Jan 4, 2022 |
| Priority date | — |
| Expiry date | May 21, 2040 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2021/052
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A gas detecting apparatus and a gas detecting method based on terahertz spectroscopy are provided. The apparatus includes a sample chamber allowing a terahertz wave to pass therethrough; a gas feeding unit connected to the sample chamber to feed gas into the sample chamber; a gas outputting unit connected to the sample chamber to output gas from the sample chamber; and a vacuum pump connected to the sample chamber to evacuate the sample chamber. The apparatus further comprises one or more of a pressure gauge disposed on the sample chamber, an anemometer disposed on the sample chamber, a humidity regulation device connected to the sample chamber, and a temperature regulation device connected to the sample chamber.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.