Patent · US Active

Acoustic resonator

US11218132B2 · kind B2 · utility

4Cited by

1References

20Claims

0Family size

Assignees

II-VI DELAWARE, INC. · US
University of South Florida · US

Inventors

Wen-Qing Xu · Sarver, US
Di Lan · Tampa, US
Jing Wang · Tampa, US
Weiqi Li · San Jose, US
Xu Han · Beijing, CN
Chao Liu · Butler, US
Elgin E. Eissler · Renfrew, US
Giovanni Barbarossa · Saratoga, US

Key dates

Filing date	Dec 4, 2018
Grant date	Jan 4, 2022
Priority date	—
Expiry date	Apr 2, 2040

Classification

Technology area (CPC H)Electricity
CPC primaryH03H9/175
WIPO fieldBasic communication processes
WIPO sectorElectrical engineering

Abstract

An acoustic resonator includes a piezoelectric stack including a piezoelectric layer having a top surface and a bottom surface, a top electrode layer disposed above the top surface, and a bottom electrode layer disposed below the bottom surface. A number of acoustic wave reflectors are disposed on a side of the bottom electrode layer opposite the piezoelectric layer. Each acoustic wave reflector includes a high acoustic impedance layer and may include a low acoustic impedance layer. The acoustic resonator may include a tether that extends laterally to a stacking direction of the layers of the piezoelectric stack. A supporting structure may be coupled to the tether opposite the acoustic resonator for anchoring the acoustic resonator. A mirror, one or more phononic crystals, or both may be positioned on proximate the tether opposite the acoustic resonator to avoid resonant waves from exiting the acoustic resonator in use.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.