Method and systems to control optical transmissivity of a polish pad material
US11219982B2 · kind B2 · utility
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25References
10Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 5, 2018 |
| Grant date | Jan 11, 2022 |
| Priority date | — |
| Expiry date | Mar 13, 2040 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB29C41/042
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
A method and systems for controlling optical transmissivity of a polish pad material are provided. The method and systems may include adjusting control parameters to determine the optical transmissivity of a polish pad material. The control parameters may also include pre-processing controls, casting controls, and/or curing controls. Methods and systems also provided for assembling a polish pad that controls the optical transmissivity of the polish pad. Additionally, a polish pad with a controlled optical transmissivity is provided.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.