Apparatus for feeding a liquid material to an evaporator device
US11220739B2 · kind B2 · utility
0Cited by
10References
22Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 1, 2017 |
| Grant date | Jan 11, 2022 |
| Priority date | — |
| Expiry date | Aug 14, 2037 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH02K44/04
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
An apparatus for feeding liquid metal to an evaporator device in a vacuum chamber, wherein the apparatus includes a container adapted to contain a liquid metal, a feed tube from the closed container to the evaporator device and an electromagnetic pump provided in the feed tube, and wherein the electromagnetic pump is placed in a vacuum enclosure.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.