Suspended cantilever waveguide
US11221447B1 · kind B1 · utility
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17References
7Claims
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Assignee
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Key dates
| Filing date | Feb 19, 2020 |
| Grant date | Jan 11, 2022 |
| Priority date | — |
| Expiry date | Feb 19, 2040 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B6/136
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
Cantilevered waveguides suspended above an air cavity in an underlying substrate are described. The waveguide is formed by patterning a waveguide layer in some embodiments, and the air cavity is formed by etching the substrate beneath the waveguide. The topside of the air cavity may be sealed by filling the openings used to etch the cavity with a sealant, such as optical epoxy. In some embodiments, the waveguide is a facet coupler, positioned at a chip facet.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.