Thin film transistor and manufacturing method thereof, array substrate and manufacturing method thereof, and display device
US11222904B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | Jan 7, 2019 |
| Grant date | Jan 11, 2022 |
| Priority date | — |
| Expiry date | Jun 23, 2039 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10D86/40
Abstract
A thin film transistor and a manufacturing method thereof, an array substrate and a manufacturing method thereof, and a display device are provided. The thin film transistor is provided on a base substrate and includes: an active layer including a first surface and a second surface which are opposite to each other, in which the second surface is closer to the base substrate than the first surface; and a source-drain electrode layer including a source electrode and a drain electrode which are separated from each other and are respectively connected with the active layer; each of the first surface and the second surface is a non-flat surface, and the non-flat surface includes a plurality of depressions and a plurality of protrusions which are alternately arranged.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.