Patent · US Active

Tunable spectral filters

US11226503B2 · kind B2 · utility

0Cited by
2References
16Claims
0Family size

Assignee

Inventors

Key dates

Filing dateDec 13, 2019
Grant dateJan 18, 2022
Priority date
Expiry dateOct 5, 2040

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG02F2203/055
  • WIPO fieldOptics
  • WIPO sectorInstruments

Abstract

A tunable spectral filter comprising a phase change material is incorporated into a multilayered dielectric structure. The dielectric permittivity, and thus the filter properties, of the structure can be modified by producing a change in the phase change material, e.g., causing a metal-insulator transition. By controllably causing such a change in the dielectric permittivity of the phase change material, the spectral transmittance and reflectance of the structure, and thus its filter properties, can be modified to provide a predetermined transmittance or reflectance of electromagnetic radiation incident on the structure. In preferred embodiments, the phase change material layer is a vanadium dioxide (VO2) film formed by atomic layer deposition (ALD).

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.