Tunable spectral filters
US11226503B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 13, 2019 |
| Grant date | Jan 18, 2022 |
| Priority date | — |
| Expiry date | Oct 5, 2040 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02F2203/055
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A tunable spectral filter comprising a phase change material is incorporated into a multilayered dielectric structure. The dielectric permittivity, and thus the filter properties, of the structure can be modified by producing a change in the phase change material, e.g., causing a metal-insulator transition. By controllably causing such a change in the dielectric permittivity of the phase change material, the spectral transmittance and reflectance of the structure, and thus its filter properties, can be modified to provide a predetermined transmittance or reflectance of electromagnetic radiation incident on the structure. In preferred embodiments, the phase change material layer is a vanadium dioxide (VO2) film formed by atomic layer deposition (ALD).
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.