Graphene microelectromechanical system (MEMS) resonant gas sensor
US11228294B2 · kind B2 · utility
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5Claims
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Key dates
| Filing date | Sep 26, 2018 |
| Grant date | Jan 18, 2022 |
| Priority date | — |
| Expiry date | Sep 26, 2038 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC01B2204/04
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method of manufacturing a nanoelectromechanical resonator allows for uniform tuning of a resonant frequency. The nanoelectromechanical resonator can be mass produced and used to sense the presence of a selected gas.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.