Transversely-excited film bulk acoustic resonator with a cavity having a curved perimeter
US11228296B2 · kind B2 · utility
9Cited by
47References
18Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 23, 2020 |
| Grant date | Jan 18, 2022 |
| Priority date | — |
| Expiry date | Nov 26, 2040 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03H2003/0442
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
Acoustic filters, resonators and methods are disclosed. An acoustic filter device includes a substrate having a surface and a single-crystal piezoelectric plate having front and back surfaces, the back surface attached to the surface of the substrate except for a portion of the piezoelectric plate forming a diaphragm that spans a cavity in the substrate. An interdigital transducer is formed on the front surface of the piezoelectric plate with interleaved fingers of the IDT disposed on the diaphragm. At least a portion of a perimeter of the cavity is curved, and the perimeter of the cavity is corner-less.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.