Patent · US Active

Low power inertial sensor architecture and methods

US11236999B1 · kind B1 · utility

1Cited by
0References
20Claims
0Family size

Assignee

Inventors

Key dates

Filing dateSep 10, 2019
Grant dateFeb 1, 2022
Priority date
Expiry dateApr 22, 2040

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG01C19/5649
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

A controller for a MEMS gyroscope includes a first portion for generating a drive signal in response to an output from drive capacitors of the MEMS gyroscope, wherein the output signal has a resonant frequency and a phase, a second portion for determining a sampling signal in response to the output, wherein the sampling signal has a frequency that is a multiple of the resonant frequency, and has the phase, a multiplexer for outputting a multiplexed data comprising first data signals from first capacitors and second capacitors of the MEMS gyroscope multiplexed in response to the sampling signal, and a processing portion for reducing the resonant frequency from the multiplexed data.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.