Ultrasensitive sensor based on a piezoelectric transistor
US11237160B2 · kind B2 · utility
0Cited by
9References
14Claims
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Key dates
| Filing date | May 15, 2019 |
| Grant date | Feb 1, 2022 |
| Priority date | — |
| Expiry date | Jan 16, 2040 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10N99/00
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Chemical sensors include a functionalized electrode configured to change surface potential in the presence of an analyte. A piezoelectric element is connected to the functionalized electrode. A piezoresistive element is in contact with the piezoelectric element.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.