Patent · US Active

Method and apparatus for examining a measuring tip of a scanning probe microscope

US11237187B2 · kind B2 · utility

1Cited by

8References

21Claims

0Family size

Assignee

Carl Zeiss SMT GmbH · DE

Inventors

Kinga Kornilov · Roßdorf, DE
Christof Baur · Darmstadt, DE
Markus Bauer · Oberkochen, DE

Key dates

Filing date	Jan 7, 2020
Grant date	Feb 1, 2022
Priority date	—
Expiry date	Jan 7, 2040

Classification

Technology area (CPC G)Physics
CPC primaryG01Q20/02
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

The present invention relates to a method for examining a measuring tip of a scanning probe microscope, wherein the method includes the following steps: (a) generating at least one test structure before a sample is analyzed, or after said sample has been analyzed, by the measuring tip; and (b) examining the measuring tip with the aid of the at least one generated test structure.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.