Ring resonator with integrated photodetector for power monitoring

US11237333B2 · kind B2 · utility

Assignee

• Ayar Labs, Inc. · US

Inventors

• Pavan Bhargava · Emeryville, US
• John Fini · Metuchen, US
• Derek Van Orden · San Francisco, US
• Chen Sun · Berkeley, US
• Mark Wade · Berkeley, US

Key dates

• Filing date: Mar 26, 2020
• Grant date: Feb 1, 2022
• Expiry date: Mar 26, 2040

Classification

• Technology area (CPC G): Physics
• CPC primary: G02F2203/15
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

A ring resonator device includes a passive optical cavity having a circuitous configuration into which is built a photodetector device. The photodetector device includes a first implant region formed within the passive optical cavity that includes a first type of implanted doping material. The photodetector device includes a second implant region formed within the passive optical cavity that includes a second type of implanted doping material, where the second type of implanted doping material is different than the first type of implanted doping material. The photodetector device includes an intrinsic absorption region present within the passive optical cavity between the first implant region and the second implant region. A first electrical contact is electrically connected to the first implant region and to a detecting circuit. A second electrical contact is electrically connected to the second implant region and to the detecting circuit.