Decoupled transversely-excited film bulk acoustic resonators
US11239816B1 · kind B1 · utility
12Cited by
67References
20Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Aug 20, 2021 |
| Grant date | Feb 1, 2022 |
| Priority date | — |
| Expiry date | Aug 20, 2041 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03H2003/0442
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
Acoustic resonator devices and filters are disclosed. An acoustic resonator includes a substrate and a piezoelectric plate having parallel front and back surfaces, the back surface attached to the substrate. A decoupling dielectric layer is on the front surface of the piezoelectric plate. An interdigital transducer (IDT) is formed over the decoupling dielectric layer such that interleaved fingers of the IDT are over a portion of the piezoelectric plate suspended across a cavity formed in the substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.