Patent · US Active

Micromechanical sensor system

US11242240B2 · kind B2 · utility

0Cited by
1References
10Claims
0Family size

Assignee

Inventors

Key dates

Filing dateSep 11, 2018
Grant dateFeb 8, 2022
Priority date
Expiry dateJan 17, 2039

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG01P2015/0871
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

A micromechanical sensor system that includes a mass that is deflectable at least in the z direction. A stop element having an elastic design is situated on the mass on at least one of the sides oriented in the z direction, via a connection element.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.