Micromechanical sensor system
US11242240B2 · kind B2 · utility
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1References
10Claims
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Key dates
| Filing date | Sep 11, 2018 |
| Grant date | Feb 8, 2022 |
| Priority date | — |
| Expiry date | Jan 17, 2039 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01P2015/0871
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A micromechanical sensor system that includes a mass that is deflectable at least in the z direction. A stop element having an elastic design is situated on the mass on at least one of the sides oriented in the z direction, via a connection element.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.