Large-area, actively tunable, asymmetric Fabry-Perot cavities for colorimetric sensing and optical switching
US11243159B1 · kind B1 · utility
Inventors
Key dates
| Filing date | Feb 6, 2020 |
| Grant date | Feb 8, 2022 |
| Priority date | — |
| Expiry date | Feb 6, 2040 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2021/7789
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A tunable colorimetric sensor/optical filter is based on a lithography-free, asymmetric Fabry-Perot cavity. The sensor has a thin-film structure formed by a lossy, porous nanoplasmonic top film deposited on an actively tunable spacer middle layer, and a reflective base layer (either a metal or semiconductor). The structure is fabricated using wafer-scale PVD processes, and the middle layer responds to the presence of a stimulus in the local environment, by expanding in thickness resulting in a shift in resonance wavelength and thus an obvious change in color of the sensor, which color change is detectable by the naked-eye. Such layered geometries exhibit vibrant, macroscopic structural coloration owing to the broadband optical absorption of the top film, enabling the change in spacer thickness to be transduced visually, circumventing the need for sophisticated optical equipment for signal readout to observe the presence of the environmental stimulus.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.