Acceleration sensor comprising differential graphene resonant beams

US11243225B2 · kind B2 · utility

Assignee

• Beihang University · CN

Inventors

• Shangchun Fan · Beijing, CN
• Futao Shi · Beijing, CN
• Weiwei Xing · Shanghai, CN

Key dates

• Filing date: Jan 22, 2018
• Grant date: Feb 8, 2022
• Expiry date: Jul 28, 2038

Classification

• Technology area (CPC B): Performing Operations; Transporting
• CPC primary: B81B2201/0235
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

An acceleration sensor with differential graphene resonant beams includes a substrate, a sensitive mass plate, a first insulating layer, a second insulating layer, a first excitation electrode pair, a first graphene resonant beam, a second graphene resonant beam, a third insulating layer, a second excitation electrode pair, and a vacuum cover. An indirect acceleration-sensitive mode is adopted, so that the sensitive mass block directly senses acceleration to be measured, and converts the acceleration to be measured into a concentrated force to cause axial displacement of the sensitive mass block and then to cause a change in the axial stress of the graphene resonate beams, thereby causing a change in the resonant frequency of the beams.