Method of operating semiconductor apparatus and semiconductor apparatus
US11243479B2 · kind B2 · utility
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20Claims
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Key dates
| Filing date | Nov 14, 2019 |
| Grant date | Feb 8, 2022 |
| Priority date | — |
| Expiry date | Nov 14, 2039 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH05G2/0092
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A method of controlling a temperature of the semiconductor device includes operating an semiconductor apparatus; maintaining a temperature of a vessel of the semiconductor apparatus with a first cooling output by a cooling controller; heating the vessel for removing a material on the vessel; transferring a first signal, by a converter, to the cooling controller when heating the vessel; and reducing the first cooling output to a second cooling output by the cooling controller base on the first signal.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.