Control method of driving frequency of pulsed variable frequency RF generator
US11244809B2 · kind B2 · utility
0Cited by
7References
12Claims
0Family size
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Key dates
| Filing date | Jun 27, 2019 |
| Grant date | Feb 8, 2022 |
| Priority date | — |
| Expiry date | Jun 4, 2040 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03H7/40
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A frequency tuning impedance matching method includes analyzing a start driving frequency, set by a user, and an RF output signal to vary a driving frequency. Specifically, a next frequency may be predicted using susceptance which is an imaginary part of measured admittance in an n-th pulse. Accordingly, impedance matching may be completed at high speed or an optimal frequency may be reached at high speed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.