Polarization measurement with interference patterns of high spatial carrier frequency
US11248955B2 · kind B2 · utility
0Cited by
4References
17Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Aug 9, 2019 |
| Grant date | Feb 15, 2022 |
| Priority date | — |
| Expiry date | Sep 30, 2039 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01J3/4531
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The present inventive concepts relate to an inspection apparatus that snapshots an interference image pattern having a high spatial carrier frequency produced from a one-piece off-axis polarimetric interferometer and that precisely and promptly measures a Stokes vector including spatial polarimetric information. The inspection apparatus dynamically measure in real-time a two-dimensional polarization information without employing a two-dimensional scanner.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.