Patent · US Active

Foreign matter analysis Method, storage medium storing foreign matter analysis program, and foreign matter analysis apparatus

US11248962B2 · kind B2 · utility

0Cited by
3References
15Claims
0Family size

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Inventors

Key dates

Filing dateJan 6, 2021
Grant dateFeb 15, 2022
Priority date—
Expiry dateJan 6, 2041

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG02B21/0076
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

A method of analyzing foreign matter in a sample includes:

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.