Opto-electro-mechanical beam manipulation system
US11249302B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Sep 27, 2019 |
| Grant date | Feb 15, 2022 |
| Priority date | — |
| Expiry date | Mar 9, 2040 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B26/0866
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An opto-electro-mechanical system for manipulating optical radiation comprising a rotationally or translationally movable element, wherein the element is itself an optical element or comprises an optical element. Furthermore the system comprises a stator for the movable element having a recess enabling a deflection range, a flexible connection between the stator and the movable element providing a corresponding kinematically defined mobility, and an actuator for deflecting the movable element, wherein the stator is connected as one piece to the movable element, and the one-piece connection consists of silicate glass- and the recess is arranged around the movable element in such a way that the movable element is deflectable in accordance with the kinematically defined mobility with elastic deformation of the connection by means of the actuator.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.