Process for producing an electrode in a base substrate and electronic device
US11251053B2 · kind B2 · utility
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2References
26Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Aug 11, 2020 |
| Grant date | Feb 15, 2022 |
| Priority date | — |
| Expiry date | Aug 11, 2040 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10D1/665
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
An electrode is included in a base substrate. A trench is produced in the base substrate. The trench is filled with an annealed amorphous material to form the electrode. The electrode is made of a crystallized material which includes particles that are implanted into a portion of the electrode that is located adjacent the front-face side of the base substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.