Systems and methods for supporting and conveying a substrate
US11251411B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Oct 4, 2019 |
| Grant date | Feb 15, 2022 |
| Priority date | — |
| Expiry date | Feb 21, 2040 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB65G49/065
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A system may include a support surface for supporting a substrate, a plurality of first passages arranged to distribute flows of a first gas to establish a gas bearing to float the substrate above the support surface, and a plurality of second passages arranged to distribute flows of a second gas to convey the substrate along the support surface. A method may include floating a substrate above a support surface of a substrate support apparatus via a gas bearing; and while floating the substrate, conveying the substrate along the support surface by flowing gas toward a surface of the substrate and in a nonperpendicular direction relative to the surface of the substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.