Bulk acoustic resonator and filter including the same
US11251767B2 · kind B2 · utility
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26Claims
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Key dates
| Filing date | Aug 3, 2020 |
| Grant date | Feb 15, 2022 |
| Priority date | — |
| Expiry date | Aug 3, 2040 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03H2003/021
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
A bulk acoustic resonator includes: a substrate including an upper surface on which a substrate protection layer is disposed; and a membrane layer forming a cavity together with the substrate, wherein a thickness deviation of either one or both of the substrate protection layer and the membrane layer is 170 Å or less.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.