Differential MEMS device and methods
US11255871B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 2, 2019 |
| Grant date | Feb 22, 2022 |
| Priority date | — |
| Expiry date | Jan 28, 2040 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01P2015/0868
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A MEMS device includes a first MEMS sensor associated with a first spatial plane and a second MEMS sensor is associated with a spatial second plane not co-planar with the first spatial plane, wherein the first MEMS sensor is configured to provide a first interrupt and a first data in response to a physical perturbation, wherein the second MEMS sensor is configured to provide a second interrupt and second data in response to the physical perturbation, and a controller configured to receive the first interrupt at a first time and the second interrupt at a second time different from the first time, wherein the controller is configured to determine a latency between the first time and the second time, and wherein the controller is configured to determine motion data in response to the first data, to the second data, and to the latency.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.