MEMS actuation systems and methods
US11261081B2 · kind B2 · utility
2Cited by
13References
22Claims
0Family size
Assignee
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Key dates
| Filing date | Sep 8, 2017 |
| Grant date | Mar 1, 2022 |
| Priority date | — |
| Expiry date | Nov 11, 2039 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB81C2203/032
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
A micro-electrical-mechanical system (MEMS) assembly includes a stationary stage, a rigid stage, at least one flexure configured to slidably couple the stationary stage and the rigid stage, at least one flexible electrode coupled and essentially orthogonal to one of the stationary stage and the rigid stage, and at least one rigid electrode coupled and essentially orthogonal to the other of the stationary stage and the rigid stage.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.