Methods for micro and nano fabrication by selective template removal
US11261085B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | May 2, 2018 |
| Grant date | Mar 1, 2022 |
| Priority date | — |
| Expiry date | May 2, 2038 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B5/1809
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
A method to remove selected parts of a thin-film material otherwise uniformly deposited over a template is disclosed. The methods rely on a suitable potting material to encapsulate and snatch the deposited material on apexes of the template. The process may yield one and/or two devices during a single process step: (i) thin-film material(s) with micro- and/or nano-perforations defined by the shape of template apexes, and (ii) micro- and/or nano-particles shaped and positioned in the potting material by the design of the template apexes. The devices made from this method may find applications in fabrication of mechanical, chemical, electrical and optical devices.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.