Integrated piezoelectric microelectromechanical ultrasound transducer (PMUT) on integrated circuit (IC) for fingerprint sensing
US11263424B2 · kind B2 · utility
1Cited by
28References
9Claims
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Key dates
| Filing date | Feb 28, 2020 |
| Grant date | Mar 1, 2022 |
| Priority date | — |
| Expiry date | Feb 28, 2040 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB81C2203/0792
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
Microelectromechanical (MEMS) devices and associated methods are disclosed. Piezoelectric MEMS transducers (PMUTs) suitable for integration with complementary metal oxide semiconductor (CMOS) integrated circuit (IC), as well as PMUT arrays having high fill factor for fingerprint sensing, are described.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.