Conductive diffuser and manufacturing method of the same
US11264243B2 · kind B2 · utility
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1References
6Claims
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Key dates
| Filing date | Jun 30, 2020 |
| Grant date | Mar 1, 2022 |
| Priority date | — |
| Expiry date | Jul 12, 2040 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67126
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A diffuser includes a diffuser element made of silicon carbide having conductivity, conductive holding members for holding the diffuser element, conductive gaskets that seal between the diffuser element and the holding members. Static electricity on the diffuser element is eliminated through the gaskets, and the holding members.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.