Graphene electrochemical transfer method assisted by multiple supporting films
US11264461B2 · kind B2 · utility
Inventors
Key dates
| Filing date | Feb 28, 2019 |
| Grant date | Mar 1, 2022 |
| Priority date | — |
| Expiry date | Jun 14, 2039 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC01B2204/22
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
Disclosed is a graphene electrochemical transfer method assisted by multiple supporting films, comprising: (1) growing graphene on a substrate, and then spin-coating a thin layer of photoresist on a surface of the graphene as a first film; (2) spin-coating n layers of thick, tough, and selectively dissolvable polymer films on the surface of the first film as an top film; (3) dissociating the multi-layer composite film and the graphene from the surface of the substrate by an electrochemical process, and dissolving the thick polymer films which is the top film with a first solvent; (4) after cleaning, transferring the thin first film and the graphene to a target substrate, and finally dissolving the thin first film away with a second solvent to complete the transfer process. This transfer process is fast, stable, and capable of transferring a large-size graphene, which may promote the large-scale application of graphene.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.