Transversely-excited film bulk acoustic resonator comprising small cells
US11264969B1 · kind B1 · utility
11Cited by
68References
22Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 9, 2021 |
| Grant date | Mar 1, 2022 |
| Priority date | — |
| Expiry date | Jun 9, 2041 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH05K7/2039
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
Acoustic resonator devices are disclosed. An acoustic resonator device includes a plurality of cells electrically connected in parallel. Each cell includes an interdigital transducer (IDT) on a piezoelectric plate, the IDT having at least 15 and not more than 35 interleaved fingers.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.